Repairs

AMAT P5000 Centura Endura

  • Synergy V452
  • Video PCB

DNS 80A 80B SK-200

  • CESP-0017 Maintenance Panel
  • EEKA-001 8-Axis Motor Driver
  • EEUE-001 EEW Assembly
  • EEYC-001 Station Controller
  • System PCBs
  • Servo AMPs
  • Power Supplies
  • LCD Monitors

GASONICS L3510 PEP-3510

  • 16495-01 I/O Interface PCB
  • 001-1070-02 Brooks Z-bot Robot Interface PCB
  • 95-0537 Gas Box Controller (mini)
  • 95-0547 Microwave Controller (mini)
  • 95-3157 Misc. Controller (mini)
  • LCD Monitor (replaces obsolete LCD)
  • CPU/Hard Drive Upgrade (replaces hard drive with Dual Raid or CF card)

KLA-TENCOR 8100 8200 8300 CD SEM

  • 880-50510 Electron Source Refurbishment
  • Installation, field-service and warranty
  • 780-13204-000 Schottky Gun Controller
  • 780-13183-000 TFE Gun Controller
  • 720-06139-001 ETDC Controller
  • 780-14688-000 Wien Filter Controller
  • Column Control Chassis
  • X-Y Motors
  • Lasers

NOVELLUS C-1

  • 19-00128-01 CPU PCB (slot 2)
  • 19-00130-00 Serial I/O Daughter PCB
  • 19-00122-00 RAM PCB (slot 3)
  • 19-00157-00 Digital I/O PCB (slot 4-5)
  • 19-00126-00 Analog Input PCB (slot 6)
  • 19-00136-00 Analog Output PCB (slot 7-8)
  • 19-00123-00 Motor Indexer PCB (slot 10-12)
  • 02-00150-00 Multibus Power Dist. PCB

PROMETRIX RS-35 RS-55 RS-75

  • 54-0006 Analog Relay PCB
  • 54-0014 DVM PCB
  • 54-0005 Current Supply PCB
  • 54-0057 Power Supply PCB
  • 54-0046 Motor Controller PCB
  • 54-0049 Parallel I/O PCB
  • 54-0252 Analog I/O Temp PCB
  • 53-0001 CPU RSXX PCB

RF GENERATOR TESTING

  • AE APEX, MDX, PDX, RFG
  • ENI OEM-12, OEM-25, OEM-28