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GetSpares is the source for parts and components used in semiconductor, high-technology, and industrial manufacturing. We provide thousands of original NOS (New-old-stock), like-new, and used parts from a diverse selection of Original Equipment Manufacturers (OEMs), like ASML, Applied Materials, Canon, DNS, Eaton, Ebara, Edwards, ENI, Gasonics, KLA-Tencor, Lam, Nikon, Novellus, Prometrix, SVG, TEL (Tokyo Electron), Varian and more.

From hard-to-find parts to repairs, GetSpares offers a high level of customer service and a willingness to help you find a solution for your manufacturing needs.


From controllers, electronics, motors, turbo pumps to RF generators and power supplies, our inventory contains thousands of parts. If you cannot find the part you need, please contact us. We have a large network of suppliers, manufacturers, and industry-wide contacts we can access to help find the parts you need.

Part Number Description OEM


GetSpares offers component repair options that are tested on the tool for which they were designed. This ON-TOOL VERIFICATION allows GetSpares to provide a high level of operational and refurbished parts for AMAT (Applied Materials), DNS, Gasonics, KLA-Tencor, Novellus, Prometrix, and TEL (Tokyo Electron) equipment sets.

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GetSpares understands that in manufacturing, the importance of an OEM part is critical for continued performance of the equipment. We have an unparalleled selection of spare parts from the leading OEMs in manufacturing.

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Got Parts? GetSpares can help you disposition your company’s discontinued, over stocked, or obsolete parts. Offering consignment opportunities, out-right purchase, or hybrid contracts.