Offering Quality OEM Spare Parts

Original Parts are Better

GetSpares carries spare parts from over 1500 different Original Equipment Manufacturers—from the most common to the less popular that are still essential to keep your operation running. Using OEM parts makes a difference in equipment reliability, performance, and maintenance.

By offering new, like-new, used, and repaired parts, there is a solution for you at a fraction of the OEM price.

A Sampling of Equipment Supported

OEM Primary Platform Secondary Platform Repairs Offered
Applied Materials (AMAT)
  • Endura
  • P5000
  • Centura
  • Mirra-Mesa
  • 8330
Asyst
  • SMIF Handlers (Small)
  • SMIF Handlers (Bolt On Uprights)
  • CPU Cards
  • Grippers
  • Loaders
Axcelis
  • GSD
  • GSD HE
  • NOVA 10-180
  • EATON 6200
  • EATON 8200/8250
  • FUSION
Brooks Automation
  • MAG 7
  • MAG 8
  • Adtran 5
  • Robot Arms
  • Wafer Orienter
  • Controllers
 PRI/Equipe
ESC 200
ESC 212
Canon
  • I3/I4/I5
  • Optics
  • Reticle Library
  • PCBs
  • Power Supplies
DNS
  • 60A
  • 60B
  • 80A
  • 80B
  • SK200
  • SK2000
KLA-Tencor
  • UV1050
  • UV1250
  • 8100 (XP,NT, MAC)
  • AIT
  • AIT II
 THERMAWAVE 2600/32XY/52XX
LAM
  • Rainbow 4400/4500
  • Alliance
  • TCP 9400/9600
  • 2300 Versys
Novellus
  • Concept 1
  • RF Power Supplies
  • RF Match
  • Spares
  • Robots
SEZ
  • Spares
SVG - RITE TRACK
  • 90X series
  • 80X series
Tokyo Electron (TEL)
  • ACT 8
  • ACT 12
  • WEE Units
  • Catch Cups
  • Robots
  • Valves
Trikon
  • Shields
  • RF Lid Assemblies
  • WEE Units
  • Catch Cups
  • Robots
  • Valves
Varian
  • e500
  • e200
  • e220
  • ViiSTA